GSO ISO 17974:2014

ISO 17974:2002
Gulf Standard   Current Edition · Approved on 25 December 2014

Surface chemical analysis -- High-resolution Auger electron spectrometers -- Calibration of energy scales for elemental and chemical-state analysis

GSO ISO 17974:2014 Files

English 27 Pages
Current Edition Reference Language

GSO ISO 17974:2014 Scope

This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and for defining the expanded uncertainty of the calibration of the kinetic energy scale with a confidence level of 95 % (this uncertainty includes contributions for behaviours observed in interlaboratory studies but does not cover all possible defects). It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy. Neither it is applicable to those instruments operated at relative resolutions poorer than 0,2 % in the constant ΔE/E mode or 1,5 eV in the constant ΔE mode, those requiring tolerance limits of ± 0,05 eV or less, nor to those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.

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