GSO ISO 14237:2013
ISO 14237:2010
Gulf Standard
Current Edition
·
Approved on
31 December 2013
Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials
GSO ISO 14237:2013 Files
English
19 Pages
Current Edition
Reference Language
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GSO ISO 14237:2013 Scope
This International Standard specifies a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon using uniformly doped materials calibrated by a certified reference material implanted with boron. This method is applicable to uniformly doped boron in the concentration range from 1 × 1016 atoms/cm3 to 1 × 1020 atoms/cm3.
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