GSO ISO 25178-603:2026
ISO 25178-603:2025
Gulf Standard
Current Edition
·
Approved on
17 September 2026
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
GSO ISO 25178-603:2026 Files
English
18 Pages
Current Edition
Reference Language
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GSO ISO 25178-603:2026 Scope
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
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